產品詳細描述
要生產晶圓，例如要生產太陽能晶圓產品，晶體需要從所謂的晶體生長爐(單晶爐、多晶爐)內的熔液拉出。
從熔液形成的晶體生長由晶體化的熔液慢慢冷卻形成的。因此，測量熔液的溫度很重要，同樣，測量加熱元件的溫度以準確控制過程也很重要。這二個溫度需要協調好，以確保晶體生長的優化。
DIAS pyrometers of series 10,40 or 44 are used for the measurement of the melting temperature. The suitable devices of series 40 and 44 are the types PYROSPOT DS 40N and DS 44N that are short-wave spectral pyrometers in the measurement range between 800 °C and 2500 °C. Depending on the type of system, ratio pyrometersof type PYROSPOT DSR 10N can be used as well. Besides the devices of the series 44 and 10 provide the advantage of a bus-compatible interface for the simplified integration in existing control systems.
Pyrometers with fibre optics and small optical head are preferred used for the measurement of the heating temperature because the space available is limited. These pyrometers of type PYROSPOT DSF 40N and DSF 44N provide a measurement range between 600 °C and 1800 °C for example and small optical heads with only 12 mm aperture. Alternatively, optics with 90°-mirror-attachment or curved fibre optics are used. The measurement spot size is only of some millimeters aperture in all variants.
The growth process is observed and controlled by the optimal interaction of the pyrometer variants for both measurement tasks.
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